| Flow Range | 0SLPM to 20SLPM |
| Package Width (mm) | 32.3 |
| Maximum Operating Pressure | 50psi |
| Style Type | In-Line |
| Minimum Operating Temperature (°C) | -20 |
| Pin Count | 3 |
| Maximum Operating Temperature (°C) | 70 |
| Maximum Output Voltage (V) | 5 |
| 印刷电路板已变更 | 3 |
| 欧盟限制某些有害物质的使用 | Compliant |
| Sensor Type | Mass |
| Package Length (mm) | 162.8 |
| Medium | Air |
| Maximum Operating Supply Voltage (V) | 15 |
| Typical Operating Supply Voltage (V) | 10 |
| Package Height (mm) | 35.6 |
| Minimum Operating Supply Voltage (V) | 8 |
